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Wafer Handling Robotics

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Manage Competitors for robotermaeher. Start My Day Free Trial. Fixed Price Repair program for atmospheric and vacuum robots, vacuum gauges, controllers, monitors and cryopumps. Wafer Handling Robotics Brooks Automation offers a full line of industry leading semiconductor wafer handling robots in extended ISO Class 1 cleanroom applications.

Semiconductor Automation Featured Product. The Brooks kinematic mounting system, patented motion control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime.

Razor Aligner High-performance atmospheric Razor Aligner provides ultra-precise wafer positioning of mm, mm, or mm wafers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time.

In addition, the MagnaTran leverages proven SCARA arm technology to provide sub 4 second fast swaps within a small containment diameter. InLigner The InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for to mm SEMI-standard and Jeida-standard wafers with either notch or flat edge fiducials.

Fusion Controls deliver maximum performance and uptime. They are fully customizable and remarkably easy to use, while accelerating time to market and tool profitability. Marathon 2 Transport System Brooks advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing and other complex manufacturing environments.

We offer a range of systems—available in numerous configurations for mm to mm wafer transport—that meet specific manufacturing environment and process requirements.

Jet Atmospheric Transport System Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core.

Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes. Spartan Sorters This unified wafer management system uses the minimum scale and complexity required to accomplish its core job — to move wafers as cleanly and as quickly as possible.

Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels. IsoPort Load Port Highly configurable, automated wafer-handling solution easily integrates with any tool. Many advanced benefits for both equipment makers and chipmakers transitioning to mm wafers.

Vision Load Port The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for mm and mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration. Narrow Reticle Indexer Improves effectiveness of reticle inventories.

Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools. In manual mode, all types of reticle or wafer carriers can be cleaned.

It achieves unsurpassed cleaning and drying results. The reticle box ID is identified and the data file is logged in the database. RS Bare Reticle Stocker Family The RS family provides a fully automated reticle management system that combines a sorter with a stocker capacity up to reticles.

RX Reticle Stocker and Carrier Buffer The RX family is an innovative combination of reticle stocker and carrier buffer for managing the reticles throughout the fab.

M mm Wafer Stocker The Brooks M is a fully-automated mm wafer stocker that stores up to 2, wafers.

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